What Is the Difference Between a SI Wafer and a Fused Silica Wafer

SI vs. Fused Silica Wafers: What's the Difference?

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December 23, 2025

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If you're looking for substrates for semiconductor, MEMS, photonics, or advanced packaging applications, you've narrowed your options to SI wafers or fused silica wafers. Both are widely used, but they address very different engineering problems.

Choosing the wrong one can result in performance issues, process incompatibilities, or unnecessary costs.

SI Wafer and Fused Silica Wafer

What Is an SI Wafer?

An SI wafer (Silicon wafer) is composed of crystalline silicon and serves as the foundation for the majority of semiconductor manufacturing. SI wafers can be conductive, semiconductive, or highly resistive, depending on their doping and resistivity.

Key characteristics of SI wafers include:

  • Electrically conductive or semiconductive
  • Compatible with standard CMOS, MEMS, and IC fabrication tools
  • Scalable to large diameters (200 mm, 300 mm)

SI wafers are ideal when electrical performance, integration, and process compatibility are critical.

What Is a Fused Silica Wafer?

A fused silica wafer is composed of high-purity amorphous silicon dioxide (SiO₂). Unlike silicon, it is electrically insulating and optically transparent over a broad range of wavelengths.

The main characteristics of fused silica wafers are:

  • Extremely high electrical insulation
  • Excellent optical transmission (UV to IR, depending on grade)
  • Very low thermal expansion
  • High resistance to chemicals and plasma
  • Amorphous (no crystal orientation)

Fused silica wafers are chosen when optical clarity, insulation, or dimensional stability matter more than electronic functionality.

SI Wafer vs. Fused Silica Wafer

SI Wafer vs. Fused Silica: Find the Right One for You

Silicon wafers and fused silica wafers can be very different. SI is conductive or semiconductive, supporting active devices. Meanwhile, fused silica is an insulating material, making it ideal for isolation and optical platforms.

While both have their key advantages, using them in the wrong situations can quickly damage your project.

There’s no universal “better” choice, only a better fit for your application. If you need help finding the right substrate, reach out to Wafer World for assistance.

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