What are the Top Silicon Wafer Etching Processes?


January 20, 2021

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Did you know that silicon wafers play a critical role in our everyday lives? These thin chips are a key component in manufacturing televisions, smartphones, and solar panels. While the silicon wafer manufacturing process involves various steps, one of the most important ones is the etching process.Etching refers to microfabrication methods that may vary depending on the silicon wafer’s intended use. However, the etching process can be performed in various ways. Let’s take a closer look at the top silicon wafer etching processes.

What is Silicon Wafer Manufacturing?

The Best Silicon Wafer Etching Processes Buffered Oxide Etching

This is the method of choice for manufacturing thin films of silicon and silicon dioxide that require etching. This process can only be achieved if hydrofluoric acid and a buffering agent such as aluminum oxide are in place.Moreover, buffer oxide etching is a repeatable process that can give you consistent outcomes. Since this etching process is photoresist compatible, it won’t undercut masked oxide, and it won’t stain silicon.

Piranha Etching: This technique requires using the piranha etching solution that contains mixtures of hydrogen peroxide and sulfuric acid. During semiconductor manufacturing, this etching process can thoroughly clean the silicon wafers by getting rid of organic compounds and oxidizing most metals found on the substrates.Although piranha etching is a highly effective process, it is seldom used because the powerful and corrosive oxidizers can make it extremely dangerous. For this reason, strict safety measures have to be taken throughout the process, and safe disposal is required.

KOH EtchingKOH Etching, also known as the Potassium Hydroxide wet etching process, is best used for creating silicon nanostructures. This technique makes it possible to create cavities in the silicon wafer while ensuring optimal precision. Since KOH etching can be automated, more and more manufacturers choose this method to reduce the cost and increase the etch's efficiency.

Copper, Gold, and Aluminum Etching: Metallic connections have to be developed on microelectronic devices. For this reason, silicon wafers must contain deposits of copper, gold, or aluminum so that they can conduct electric signals. During the silicon wafer process, these metals will be etched with the use of various chemicals.

What is Silicon Wafer Manufacturing?

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